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350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers

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350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers

Brand Name : BonTek

Model Number : Fused Silica, Fused Quartz

Certification : ISO:9001, ISO:14001

Place of Origin : China

MOQ : 5 pcs

Price : Negotiable

Payment Terms : T/T

Supply Ability : 20000 pcs/Month

Delivery Time : 1-4 weeks

Packaging Details : Cassette/ Jar package, vaccum sealed

Material : Glass Wafer

Type : Fused Silica, Fused Quartz, Borosilicate, Soda Lime

Brand : Corning, Schott, Ohara

Diameter : 3'', 4'', 6'', 8'', 12''

Thickness : 350um, 500um, 1000um

Flat : 22mm, 32.5mm, 47.5mm, 57.5mm

Surface : DSP, SSP, DSL

Roughness : Ra<1nm

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Fused Silica Quartz Borosilicate Glass Wafer As Carrier Wafers

Due to their low thickness, thin wafers are vulnerable to stress and breakage. Warping of the wafers during handling and processing causes a high yield loss or can even make it impossible to handle the wafers any more. This means that a thin wafer handling technology with a high degree of flexibility on wafer and substrate sizes is needed. Carrier wafers need to have certain properties, such as: mechanical robustness; chemical and high-temperature resistance; incredibly low tolerances (down to 1 μm thickness variation); and thermal expansion adjusted to the used material, for example, gallium arsenide (GaAs), Indium phosphide (InP), silicon (Si) or silicon carbide (SiC). Furthermore, handling tools sometimes need to be suitable for materials such as GaAs and Si, or even CMOS compatible.

High-end carrier wafers made of glass, quartz or silicon can meet the aforementioned requirements. Glass and quartz are excellent materials for carrier wafers because of their thermal stability and resistance against acids and other chemicals. Bonding to and de-bonding from glass and quartz carrier wafers can be monitored since they are transparent. Furthermore, glass carrier wafers can be cleaned and re-used, thus contributing to cost reduction and environmental protection.

BonTek works on a variety of glass and quartz materials, Fused Silica (JGS1, JGS2, JGS3, Corning 7980), Eagle XG, Schott BF33, Pyrex, MEMpax, B270, D263T, Zerodur etc.

350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers

Material

UV Fused Silica, Fused Quartz (JGS1, JGS2, JGS3)

Specification

unit

3”

4”

5"

6"

8"

12"

Diameter (or Square)

mm

76.2

100

125

150

200

300

Tol(±)

mm

<0.1~0.25 mm

Thinnest Thickness

mm

>0.10

>0.10

>0.30

>0.30

>0.30

>0.50

Primary Flat

mm

22

32.5

42.5

57.5/notch

notch

notch

LTV (5mmx5mm)

µm

<2

<2

<2

<2

<2

<10

TTV

µm

<8

<10

<15

<20

<30

<30

Bow

µm

±20

±25

±40

±40

±60

±60

Warp

µm

<30

<40

<50

<50

<60

<60

PLTV(<0.5um)

%

≥95%(5mm*5mm)

Transmittance

UV, Optical, IR or Custom option

Edge Rounding

mm

Compliant with SEMI M1.2 Standard/refer to IEC62276

Surface Type

Single Side Polished /Double Sides Polished

Polished side Ra

nm

<1.0nm or specific per requested

Back Side Criteria

µm

General is 0.2-0.5µm or as customized

Appearance

Contamination

None

Particles>0.3µm

<=30

Saw Marks, striations

None

Scratch

None

Cracks, saw marks, stains

None

350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers

350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers

Acceptance Check

350um Fused Silica Wafer Quartz Borosilicate Glass Carrier Wafers

  • The product is fragile. We have adequately packed it and labeled it fragile. We deliver through excellent domestic and international express companies to ensure transportation quality.

  • After receiving the goods, please handle with care and check whether the outer carton is in good condition. Carefully open the outer carton and check whether the packing boxes are in alignment. Take a picture before you take them out.

​

  • Please open the vacuum package in a clean room when the products are to be applied.

  • If the products are found damaged during courier, please take a picture or record a video immediately. DO NOT take the damaged products out of the packaging box! Contact us immediately and we will solve the problem well.

Product Tags:

Fused Silica Borosilicate Glass Wafer

      

Fused Silica Wafer 350um

      

Fused Silica Quartz Carrier Wafer

      
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